Characteristics of a‐IZO TFTs with high‐κ HfSiOx gate insulator annealed in various conditions

E-ISSN： 1938-3657|23|8|384-390

ISSN： 1071-0922

Source： JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, Vol.23, Iss.8, 2015-08, pp. : 384-390

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