Low Temperature Activation of Grown-In Defects Limiting the Lifetime of High Purity n-Type Float-Zone Silicon Wafers

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2015|242|120-125

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2015, Iss.242, 2016-02, pp. : 120-125

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Abstract