Properties study of silicon carbide thin films prepared by electron cyclotron resonance plasma technology

Author： Valovič A.   Huran J.   Kučera M.   Kobzev A.P.   Gaži Š.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|56|2|24013-24013

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.56, Iss.2, 2011-10, pp. : 24013-24013

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