Control of the substrate temperature using a triode magnetron sputtering system

Author： Duarte D. A. Sagás J. C. Fontana L. C. da Silva Sobrinho A. S. Cinelli M. J.

E-ISSN： 1286-0050|52|3|31001-31001

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.52, Iss.3, 2010-11, pp. : 31001-31001

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