Effect of hydrogen implantation in 6H-SiC before and after thermal oxidation

Author: Arghavani Nia B.   Solaymani S.   Ghaderi A.   Agha Aligol D.   Baghizadeh A.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|55|1|11301-11301

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.55, Iss.1, 2011-07, pp. : 11301-11301

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract