Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etching

Author: Mehran M.   Kolahdouz Z.   Sanaee Z.   Azimi S.   Mohajerzadeh S.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|55|1|11302-11302

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.55, Iss.1, 2011-07, pp. : 11302-11302

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Abstract