Publisher: Edp Sciences
E-ISSN: 1764-7177|03|C3|C3-123-C3-130
ISSN: 1155-4339
Source: Le Journal de Physique IV, Vol.03, Iss.C3, 1993-08, pp. : C3-123-C3-130
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
AN UNDERSTANDING OF IN SITU BORON DOPED POLYSILICON FILMS BY CHARACTERIZATION AND SIMULATION
Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. :
UHV CHEMICAL VAPOUR DEPOSITION OF UNDOPED AND IN-SITU DOPED POLYSILICON FILMS
Le Journal de Physique IV, Vol. 02, Iss. C2, 1991-09 ,pp. :