Deposition of Thick Layers, in a New CVD Reactor

Publisher: Edp Sciences

E-ISSN: 1764-7177|05|C5|C5-997-C5-1004

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-997-C5-1004

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next