Thermochemical and Mass Transport Modelling of the Chemical Vapour Deposition of Si1-xGex

Publisher： Edp Sciences

E-ISSN： 1764-7177|05|C5|C5-63-C5-70

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-63-C5-70

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