AES characterization and depth profiles measurements of AIN thin films on SiO2 substrates

Publisher: Edp Sciences

E-ISSN: 1764-7177|03|C3|C3-171-C3-176

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.03, Iss.C3, 1993-08, pp. : C3-171-C3-176

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next