Transport phenomena in a cold wall vertical reactor for metalorganic vapor phase growth of β-SiC layers

Publisher： Edp Sciences

E-ISSN： 1764-7177|03|C3|C3-131-C3-138

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.03, Iss.C3, 1993-08, pp. : C3-131-C3-138

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