Transmission Electron Microscopy Studies of (AIN-Si3N4) Codeposits Obtained by LPCVD

Publisher： Edp Sciences

E-ISSN： 1764-7177|05|C5|C5-905-C5-912

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.05, Iss.C5, 1995-06, pp. : C5-905-C5-912

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Chemical Vapour Deposition of AIN-Si3N4 Codeposits

By  

Le Journal de Physique IV, Vol. 05, Iss. C5, 1995-06 ,pp. : C5-785-C5-792

Edp Sciences

Access to resources Recommend Favorite

A study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique

By  

Le Journal de Physique IV, Vol. 03, Iss. C3, 1993-08 ,pp. : C3-519-C3-526

Edp Sciences

Access to resources Recommend Favorite

COMPORTEMENT PHYSICO-CHIMIQUE DE Si3N4 OBTENU PAR LPCVD SOUMIS A DES FLUX RADIATIFS INTENSES

By  

Le Journal de Physique Colloques, Vol. 50, Iss. C5, 1989-05 ,pp. : C5-353-C5-362

Edp Sciences

Access to resources Recommend Favorite

TRANSMISSION ELECTRON MICROSCOPY STUDIES OF GRAIN BOUNDARIES IN CERAMICS

By  

Le Journal de Physique Colloques, Vol. 43, Iss. C6, 1982-12 ,pp. : C6-115-C6-133

Edp Sciences

Access to resources Recommend Favorite

A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

By Schöning Michael J.   Simonis Anette   Ruge Christian   Ecken Holger   Müller-Veggian Mattea   Lüth Hans  

Sensors, Vol. 2, Iss. 1, 2002-01 ,pp. : 11-22

MDPI

Access to resources Recommend Favorite