RMPECVD of silica films in large scale microwave plasma reactor : Films properties

Publisher： Edp Sciences

E-ISSN： 1764-7177|09|PR8|Pr8-819-Pr8-826

ISSN： 1155-4339

Source： Le Journal de Physique IV, Vol.09, Iss.PR8, 1999-09, pp. : Pr8-819-Pr8-826

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

RMPECVD of silica films with a high microwave power (1600 W) parametric studies

By  

Le Journal de Physique IV, Vol. 11, Iss. PR3, 2001-08 ,pp. : Pr3-771-Pr3-778

Edp Sciences

Access to resources Recommend Favorite

Large microwave plasma reactor based on surface waves

By  

Le Journal de Physique IV, Vol. 08, Iss. PR7, 1998-10 ,pp. : Pr7-187-Pr7-194

Edp Sciences

Access to resources Recommend Favorite

Microtopography and field emission properties of carbon films grown in a microwave gas discharge plasma

By Suzdal’tsev S.   Yafarov R.  

Physics of the Solid State, Vol. 46, Iss. 2, 2004-02 ,pp. : 378-382

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Synthesis of carbon films in a plasma-chemical reactor based on beam-plasma discharge

By Shustin E.   Isaev N.   Klykov I.   Peskov V.   Polyakov V.   Rukovishnikov A.   Temiryazeva M.  

Technical Physics, Vol. 58, Iss. 2, 2013-02 ,pp. : 245-250

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

The Characterization of Microwave Properties of PU-AgNWs Films

By Sun Wen Hsien   Hung Dung Shing   Song Tsing Tang   Lee Shang Fan  

Ferroelectrics, Vol. 435, Iss. 1, 2012-01 ,pp. : 148-154

Taylor & Francis Ltd

Access to resources Recommend Favorite