TEM AND RBS STUDIES OF THE REGROWTH OF ARSENIC IMPLANTED POLYSILICON DUE TO AN OXIDATION DRIVE-IN

Publisher: Edp Sciences

E-ISSN: 0449-1947|43|C1|C1-253-C1-258

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.43, Iss.C1, 1982-10, pp. : C1-253-C1-258

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