ARSENIC SEGREGATION IN POLYSILICON AND AT THE POLY/SINGLE CRYSTALLINE SILICON INTERFACE

Publisher： Edp Sciences

E-ISSN： 0449-1947|46|C4|C4-523-C4-528

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.46, Iss.C4, 1985-04, pp. : C4-523-C4-528

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