TREATMENT OF REFRACTORY OXIDES IN HF-PLASMA REACTORS

Publisher： Edp Sciences

E-ISSN： 0449-1947|51|C5|C5-19-C5-25

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.51, Iss.C5, 1990-09, pp. : C5-19-C5-25

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Nitrogen oxides and methane treatment by non-thermal plasma

By  

Journal of Physics: Conference Series , Vol. 591, Iss. 1, 2015-03 ,pp. : 400-406

IOP Publishing

Access to resources Recommend Favorite

Treatment of refractory powders by a novel, high enthalpy dc plasma

By Pershin L.   Mitrasinovic A.   Mostaghimi J.  

Journal of Physics D: Applied Physics, Vol. 46, Iss. 22, 2013-06 ,pp. : 224019-224026

IOP Publishing

Access to resources Recommend Favorite

Microwave reactors for plasma chemistry

By  

Le Journal de Physique IV, Vol. 08, Iss. PR7, 1998-10 ,pp. : Pr7-401-Pr7-410

Edp Sciences

Access to resources Recommend Favorite

Optimization of Fluorine Plasma Treatment for Interface Improvement on HfO2/In0.53Ga0.47As MOSFETs

By Chen Yen-Ting   Wang Yanzhen   Lee Jack C.  

Applied Sciences, Vol. 2, Iss. 1, 2012-03 ,pp. : 233-244

MDPI

Access to resources Recommend Favorite

Optical constants of refractory oxides at high temperatures⋆

By Zeidler S.   Posch Th.   Mutschke H.  

Astronomy & Astrophysics, Vol. 553, Iss. issue, 2013-05 ,pp. : A81-A81

Edp Sciences

Access to resources Recommend Favorite