LIMITATIONS ON n+/p+ SPACING DUE TO SHADOWING EFFECTS IN A 0.7µm RETROGRADE WELL CMOS PROCESS

Publisher: Edp Sciences

E-ISSN: 0449-1947|49|C4|C4-553-C4-556

ISSN: 0449-1947

Source: Le Journal de Physique Colloques, Vol.49, Iss.C4, 1988-09, pp. : C4-553-C4-556

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