Simulation study of SiH$_{4}$ microdischarges in a narrow channel

Publisher： Edp Sciences

E-ISSN： 1286-4854|77|4|45003-45003

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.77, Iss.4, 2007-02, pp. : 45003-45003

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