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Author: Bergers L.
Publisher: Edp Sciences
E-ISSN: 2100-014x|6|issue|06003-06003
ISSN: 2100-014x
Source: EPJ Web of Conference, Vol.6, Iss.issue, 2010-06, pp. : 06003-06003
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Abstract
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Characterizing time-dependent mechanics in metallic MEMS
EPJ Web of Conference, Vol. 6, Iss. issue, 2010-06 ,pp. :
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