Characterizing time-dependent mechanics in metallic MEMS

Author: Bergers L.I.J.C.  

Publisher: Edp Sciences

E-ISSN: 2100-014x|6|issue|40002-40002

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.6, Iss.issue, 2010-06, pp. : 40002-40002

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Abstract