Multiphysics Parallel Kinematics Modeling of a 3DOF MEMS Mirror

Author： Mamat N.  

Publisher： Edp Sciences

E-ISSN： 2261-236x|32|issue|01004-01004

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.32, Iss.issue, 2015-12, pp. : 01004-01004

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