High Sensitivity MEMS Strain Sensor: Design and Simulation

Author： Mohammed Ahmed A. S.   Moussa Walied A.   Lou Edmond  

Publisher： MDPI

E-ISSN： 1424-8220|8|4|2642-2661

ISSN： 1424-8220

Source： Sensors, Vol.8, Iss.4, 2008-04, pp. : 2642-2661

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