High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity

Author: Mohammed Ahmed A. S.   Moussa Walied A.   Lou Edmond  

Publisher: MDPI

E-ISSN: 1424-8220|11|2|1819-1846

ISSN: 1424-8220

Source: Sensors, Vol.11, Iss.2, 2011-01, pp. : 1819-1846

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Abstract