A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS

Author: Boutaayamou Mohamed   Sabariego Ruth V.   Dular Patrick  

Publisher: MDPI

E-ISSN: 1424-8220|8|2|994-1003

ISSN: 1424-8220

Source: Sensors, Vol.8, Iss.2, 2008-02, pp. : 994-1003

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract