Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

Author： Zhang Wen-Ming   Meng Guang   Chen Di  

Publisher： MDPI

E-ISSN： 1424-8220|7|5|760-796

ISSN： 1424-8220

Source： Sensors, Vol.7, Iss.5, 2007-05, pp. : 760-796

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