A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

Author： Takahata Kenichi   Gianchandani Yogesh B.  

Publisher： MDPI

E-ISSN： 1424-8220|8|4|2317-2330

ISSN： 1424-8220

Source： Sensors, Vol.8, Iss.4, 2008-04, pp. : 2317-2330

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