An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor

Author： Hao Xiuchun   Jiang Yonggang   Takao Hidekuni   Maenaka Kazusuke   Higuchi Kohei  

Publisher： MDPI

E-ISSN： 1424-8220|12|6|8026-8038

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.6, 2012-06, pp. : 8026-8038

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