Electrical Characterization of Microelectromechanical Silicon Carbide Resonators

Author: Chang Wen-Teng   Zorman Christian  

Publisher: MDPI

E-ISSN: 1424-8220|8|9|5759-5774

ISSN: 1424-8220

Source: Sensors, Vol.8, Iss.9, 2008-09, pp. : 5759-5774

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Abstract