Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Author： Kurek Maksymilian   Larsen Frederik K.   Larsen Peter E.   Schmid Silvan   Boisen Anja   Keller Stephan S.  

Publisher： MDPI

E-ISSN： 1424-8220|16|7|1097-1097

ISSN： 1424-8220

Source： Sensors, Vol.16, Iss.7, 2016-07, pp. : 1097-1097

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