Fabrication and Characterization of Silicon Micro-Funnels and Tapered Micro-Channels for Stochastic Sensing Applications

Author： Archer Marie J. Ligler Frances S.

Publisher： MDPI

E-ISSN： 1424-8220|8|6|3848-3872

ISSN： 1424-8220

Source： Sensors, Vol.8, Iss.6, 2008-06, pp. : 3848-3872

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