Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

Author: Sadek Khaled   Moussa Walied  

Publisher: MDPI

E-ISSN: 1424-8220|7|3|319-340

ISSN: 1424-8220

Source: Sensors, Vol.7, Iss.3, 2007-03, pp. : 319-340

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Abstract