Piezoresistive Sensitivity, Linearity and Resistance Time Drift of Polysilicon Nanofilms with Different Deposition Temperatures

Author： Shi Changzhi   Liu Xiaowei   Chuai Rongyan  

Publisher： MDPI

E-ISSN： 1424-8220|9|02|1141-1166

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.02, 2009-02, pp. : 1141-1166

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