Mechanical-Thermal Noise in Drive-Mode of a Silicon Micro-Gyroscope

Author: Yang Bo   Wang Shourong   Li Hongsheng   Zhou Bailing  

Publisher: MDPI

E-ISSN: 1424-8220|9|05|3357-3375

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.05, 2009-05, pp. : 3357-3375

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Abstract