Development of a Prototype Miniature Silicon Microgyroscope

Author: Xia Dunzhu   Chen Shuling   Wang Shourong  

Publisher: MDPI

E-ISSN: 1424-8220|9|6|4586-4605

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.6, 2009-06, pp. : 4586-4605

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Abstract