Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

Author： Ostasevicius Vytautas Gaidys Rimvydas Dauksevicius Rolanas

Publisher： MDPI

E-ISSN： 1424-8220|9|12|10201-10216

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.12, 2009-12, pp. : 10201-10216

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