A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

Author： Ma Rong-Hua   Wang Dung-An   Hsueh Tzu-Han   Lee Chia-Yen  

Publisher： MDPI

E-ISSN： 1424-8220|9|7|5460-5476

ISSN： 1424-8220

Source： Sensors, Vol.9, Iss.7, 2009-07, pp. : 5460-5476

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