An Integrated Thermal Compensation System for MEMS Inertial Sensors

Author： Chiu Sheng-Ren   Teng Li-Tao   Chao Jen-Wei   Sue Chung-Yang   Lin Chih-Hsiou   Chen Hong-Ren   Su Yan-Kuin  

Publisher： MDPI

E-ISSN： 1424-8220|14|3|4290-4311

ISSN： 1424-8220

Source： Sensors, Vol.14, Iss.3, 2014-03, pp. : 4290-4311

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