An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer

Author: Chen Deyong   Wu Zhengwei   Liu Lei   Shi Xiaojing   Wang Junbo  

Publisher: MDPI

E-ISSN: 1424-8220|9|3|1330-1338

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.3, 2009-02, pp. : 1330-1338

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