A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

Author： Yang Bo   Wang Xingjun   Dai Bo   Liu Xiaojun  

Publisher： MDPI

E-ISSN： 1424-8220|15|1|687-702

ISSN： 1424-8220

Source： Sensors, Vol.15, Iss.1, 2015-01, pp. : 687-702

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