Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists

Author: Chen Lung-Tai   Chang Jin-Sheng   Hsu Chung-Yi   Cheng Wood-Hi  

Publisher: MDPI

E-ISSN: 1424-8220|9|8|6200-6218

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.8, 2009-08, pp. : 6200-6218

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Abstract