Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference

Author： Ling Biyun Peng Chunrong Ren Ren Chu Zhaozhi Zhang Zhouwei Lei Hucheng Xia Shanhong

Publisher： MDPI

E-ISSN： 1424-8220|18|3|870-870

ISSN： 1424-8220

Source： Sensors, Vol.18, Iss.3, 2018-03, pp. : 870-870

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