Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach

Author: Mariani Stefano   Ghisi Aldo   Corigliano Alberto   Zerbini Sarah  

Publisher: MDPI

E-ISSN: 1424-8220|9|1|556-567

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.1, 2009-01, pp. : 556-567

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Abstract