Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector

Author： Zhang Chi   You Zheng   Huang Hu   Li Guanhua  

Publisher： MDPI

E-ISSN： 1424-8220|10|7|6848-6860

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.7, 2010-07, pp. : 6848-6860

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