Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Author： Zhu Rong   Ding Henggao   Su Yan   Yang Yongjun  

Publisher： MDPI

E-ISSN： 1424-8220|10|9|8304-8315

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.9, 2010-09, pp. : 8304-8315

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