High-Q MEMS Resonators for Laser Beam Scanning Displays

Author: Hofmann Ulrich   Janes Joachim   Quenzer Hans-Joachim  

Publisher: MDPI

E-ISSN: 2072-666x|3|2|509-528

ISSN: 2072-666x

Source: Micromachines, Vol.3, Iss.2, 2012-06, pp. : 509-528

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Abstract