Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

Author： Yang Jian   Si Chaowei   Han Guowei   Zhang Meng   Ma Liuhong   Zhao Yongmei   Ning Jin  

Publisher： MDPI

E-ISSN： 2072-666x|6|2|281-290

ISSN： 2072-666x

Source： Micromachines, Vol.6, Iss.2, 2015-02, pp. : 281-290

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