Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

Author： Venturini Francesco   Sansotera Maurizio   Martinez Vazquez Rebeca   Osellame Roberto   Cerullo Giulio   Navarrini Walter  

Publisher： MDPI

E-ISSN： 2072-666x|3|4|604-614

ISSN： 2072-666x

Source： Micromachines, Vol.3, Iss.4, 2012-09, pp. : 604-614

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