Author： Tielen Viktor Bellouard Yves
Publisher： MDPI
E-ISSN： 2072-666x|5|3|697-710
ISSN： 2072-666x
Source： Micromachines, Vol.5, Iss.3, 2014-09, pp. : 697-710
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Abstract
Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.
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