Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades

Author： Lötters Joost C.   Lammerink Theo S.J.   Groenesteijn Jarno   Haneveld Jeroen   Wiegerink Remco J.  

Publisher： MDPI

E-ISSN： 2072-666x|3|1|194-203

ISSN： 2072-666x

Source： Micromachines, Vol.3, Iss.1, 2012-03, pp. : 194-203

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