Micromachined Thermal Flow Sensors—A Review

Author: Kuo Jonathan T. W.   Yu Lawrence   Meng Ellis  

Publisher: MDPI

E-ISSN: 2072-666x|3|3|550-573

ISSN: 2072-666x

Source: Micromachines, Vol.3, Iss.3, 2012-07, pp. : 550-573

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Abstract